1122_Introduction to Semiconductor Equipment
Course Period：Now ~ Any Time
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Course Intro
Course Plan
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Lecture_0
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設備概論_1_material
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Lecture_2_device
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Lecture_3_wafer transfer
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Lecture_4-1_clean room
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Lecture_4-2_wafer production
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Lecture_5_PVD
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Lecture_6_CVD
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Lecture_7_lithography
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Lecture_８_etch
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Lecture_9_vacuum
Teacher /
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