1121_Introduction to Semiconductor Equipment
Course Period：Now ~ Any Time
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Course Intro
Course Plan
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Lecture 0_introduction
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Lecture 1_materials
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Lecture 2_MOSFET
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Lecture 3-1_clean room
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Lecture 3-2_wafer production
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Lecture 4_PVD
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Lecture 5_CVD
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Lecture 6_Lithography
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Lecture 7_Etch
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Lecture 8_SEM
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Lecture 3-3_wafer transfer
Teacher /
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