1121_Introduction to Semiconductor Equipment
Course Period:Now ~ Any Time
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Course Intro
Course Plan
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Lecture 0_introduction
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Lecture 1_materials
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Lecture 2_devices
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Lecture 3_clean room
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Lecture 4_wafer
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Lecture 5_PVD
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Lecture 6_CVD
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Lecture 7_Litho
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Lecture 8_Etch
Teacher /