1121_Introduction to Semiconductor Equipment
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Course Intro

Course Plan

  • Lecture 0_introduction
  • Lecture 1_materials
  • Lecture 2_devices
  • Lecture 3_clean room
  • Lecture 4_wafer
  • Lecture 5_PVD
  • Lecture 6_CVD
  • Lecture 7_Litho
  • Lecture 8_Etch
Teacher / 

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