1122_Introduction to Semiconductor Equipment
Course Period：Now ~ Any Time
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Course Intro
Course Plan
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Lecture_0_introduction
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Lecture_1_materials
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Lecture_2_MOSFET device
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Lecture_3_wafer transfer
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Lecture_4_clean room
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Lecture_5_wafer production
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Lecture_6_PVD
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Lecture_7_CVD
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Lecture_8_lithography
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Lecture_9_etch
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Lecture_10_vacuum
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Lecture_11_SEM
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Lecture_12_metallization
Teacher /
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