1131_Introduction to Semiconductor Equipment
Course Period：Now ~ Any Time
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Course Intro
Course Plan
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0-introduction
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1-materials
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2-devices
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2.5-MOSFET
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3-wafer transfer
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4-clean room
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5_wafer production
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6_PVD
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7_CVD
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8_lithography
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9_etch
Teacher /
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